Local stress analysis on semiconductor devices by combined experimental-numerical procedure

R Kregting, S Gielen, W van Driel, PFA Alkemade, H Miro, JD Kamminga

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)1092-1096
Number of pages5
JournalMicroelectronics Reliability
Issue number6
Publication statusPublished - 2011


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