Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors

R Ishihara, PC van der Wilt, BD van Dijk, JW Metselaar, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationThin film transistor technologies VI; proceedings of the electrochemical society's 202nd meeting
EditorsY Kuo
Place of Publications.l.
PublisherECS
Pages63-74
Number of pages12
Publication statusPublished - 2002
EventElectrochemical society's 202nd meeting, Salt Lake City - s.l.
Duration: 21 Oct 200223 Oct 2002

Publication series

Name
PublisherECS

Conference

ConferenceElectrochemical society's 202nd meeting, Salt Lake City
Period21/10/0223/10/02

Keywords

  • Conf.proc. > 3 pag

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