Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors

R Ishihara; PC van der Wilt; BD van Dijk; JW Metselaar; CIM Beenakker

Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors

R Ishihara
, PC van der Wilt
, BD van Dijk
, JW Metselaar
, CIM Beenakker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Thin film transistor technologies VI; proceedings of the electrochemical society's 202nd meeting
Editors	Y Kuo
Place of Publication	s.l.
Publisher	ECS
Pages	63-74
Number of pages	12
Publication status	Published - 2002
Event	Electrochemical society's 202nd meeting, Salt Lake City - s.l. Duration: 21 Oct 2002 → 23 Oct 2002

Publication series

Name
Publisher	ECS

Conference

Conference	Electrochemical society's 202nd meeting, Salt Lake City
Period	21/10/02 → 23/10/02

Bibliographical note

niet eerder opgevoerd

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{81ff1c3680b848ef8a47f50312d3bce8,

title = "Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors",

keywords = "Conf.proc. > 3 pag",

author = "R Ishihara and \{van der Wilt\}, PC and \{van Dijk\}, BD and JW Metselaar and CIM Beenakker",

note = "niet eerder opgevoerd; Electrochemical society's 202nd meeting, Salt Lake City ; Conference date: 21-10-2002 Through 23-10-2002",

year = "2002",

language = "Undefined/Unknown",

publisher = "ECS",

pages = "63--74",

editor = "Y Kuo",

booktitle = "Thin film transistor technologies VI; proceedings of the electrochemical society's 202nd meeting",

}

Ishihara, R, van der Wilt, PC, van Dijk, BD, Metselaar, JW & Beenakker, CIM 2002, Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors. in Y Kuo (ed.), Thin film transistor technologies VI; proceedings of the electrochemical society's 202nd meeting. ECS, s.l., pp. 63-74, Electrochemical society's 202nd meeting, Salt Lake City, 21/10/02.

Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors. / Ishihara, R; van der Wilt, PC; van Dijk, BD et al.
Thin film transistor technologies VI; proceedings of the electrochemical society's 202nd meeting. ed. / Y Kuo. s.l.: ECS, 2002. p. 63-74.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors

AU - Ishihara, R

AU - van der Wilt, PC

AU - van Dijk, BD

AU - Metselaar, JW

AU - Beenakker, CIM

N1 - niet eerder opgevoerd

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 63

EP - 74

BT - Thin film transistor technologies VI; proceedings of the electrochemical society's 202nd meeting

A2 - Kuo, Y

PB - ECS

CY - s.l.

T2 - Electrochemical society's 202nd meeting, Salt Lake City

Y2 - 21 October 2002 through 23 October 2002

ER -