Location-control of large Si grains by dual-beam excimer-laser and thick oxide portion

Research output: Contribution to journalArticleScientific

36 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)3872-3878
Number of pages7
JournalJapanese Journal of Applied Physics. Part 2, Letters & Express Lettres
Volume39
Issue number7
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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