Location control of laterally columnar Si grains by deal-beam excimer-laser melting of Si Thin-film

R Ishihara

Location control of laterally columnar Si grains by deal-beam excimer-laser melting of Si Thin-film

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings
Editors	KL Jensen, ... [et Al]
Place of Publication	Warrendale
Publisher	Material Research Society
Pages	1-6
Number of pages	6
ISBN (Print)	1-55899-529-3
Publication status	Published - 2001
Event	Electron-Emissive Materials, Vacuum Microelectronics and Flat-Panel Displays, San Francisco - Warrendale Duration: 25 Apr 2000 → 27 Apr 2000

Publication series

Name
Publisher	Material Research Society

Conference

Conference	Electron-Emissive Materials, Vacuum Microelectronics and Flat-Panel Displays, San Francisco
Period	25/04/00 → 27/04/00

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{33fd695ce96a4f55aecfd36e3141d668,

title = "Location control of laterally columnar Si grains by deal-beam excimer-laser melting of Si Thin-film",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "R Ishihara",

year = "2001",

language = "Undefined/Unknown",

isbn = "1-55899-529-3",

publisher = "Material Research Society",

pages = "1--6",

editor = "{KL Jensen} and {... [et Al]}",

booktitle = "Proceedings",

note = "Electron-Emissive Materials, Vacuum Microelectronics and Flat-Panel Displays, San Francisco ; Conference date: 25-04-2000 Through 27-04-2000",

}

TY - GEN

T1 - Location control of laterally columnar Si grains by deal-beam excimer-laser melting of Si Thin-film

AU - Ishihara, R

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 1-55899-529-3

SP - 1

EP - 6

BT - Proceedings

A2 - KL Jensen, null

A2 - ... [et Al], null

PB - Material Research Society

CY - Warrendale

T2 - Electron-Emissive Materials, Vacuum Microelectronics and Flat-Panel Displays, San Francisco

Y2 - 25 April 2000 through 27 April 2000

ER -