@inproceedings{1e321e4231094fae81b7431a91a51016,
title = "Long-term encapsulation of platinum metallization using a HfO2 ALD - PDMS bilayer for non-hermetic active implants",
abstract = "In this work, we investigate the insulating performance of an atomic layer deposited (ALD) HfO2 - polymer bilayer for platinum (Pt) metallization. As test vehicles, Pt interdigitated comb structures (IDC) were designed and fabricated on SiO2/Si substrates. The IDCs were first coated with a 100 nm thin HfO2 ALD layer. A group of samples was further encapsulated with a low-viscosity biocompatible polydimethylsiloxane (PDMS) which resulted in an HFO2-PDMS bilayer. All samples were soaked in phosphate buffered saline for 450 days at room temperature. Evaluation of the coatings included monthly optical inspection and electrochemical impedance spectrometry. For ALD-only coated IDC structures, impedance results right after submersion in saline indicated the presence of defects in the layer. Long-term impedance recordings showed a slight drop, indicating water ingress through the defects, further exposing the metal to saline. For the HfO2-PDMS encapsulated samples, on the other hand, stable impedance results were recorded over the duration of the soak study. This suggests the excellent properties of low-viscosity PDMS both in filling the defects of the ALD layer and in maintaining a long-term underwater adhesion to HfO2. The results from this investigation, therefore, propose a new encapsulation method based on HfO2-PDMS bilayer for long-term packaging of active implants incorporating Pt metallization. ",
keywords = "ALD, PDMS, bioelectronic medicine, leakage, lifetime reliability, non-hermetic implants, packaging, platinum",
author = "K. Nanbakhsh and R. Ritasalo and W.A. Serdijn and V. Giagka",
year = "2020",
month = may,
day = "1",
doi = "10.1109/ECTC32862.2020.00081",
language = "English",
series = "Proceedings - Electronic Components and Technology Conference",
publisher = "IEEE Sensors",
pages = "467--472",
editor = "L. O'Conner and H Torres",
booktitle = "Proceedings - IEEE 70th Electronic Components and Technology Conference, ECTC 2020",
note = "70th IEEE Electronic Components and Technology Conference, ECTC 2020 ; Conference date: 03-06-2020 Through 30-06-2020",
}