Low-energy foil aberration corrector

P Kruit (Inventor), RH van Aken (Inventor)

    Research output: Patent

    10 Citations (Scopus)
    Original languageUndefined/Unknown
    Patent numberOCT-02-01
    IPCaangevraagd door TU Delft en Stichting FOM
    Priority date26/08/02
    Publication statusPublished - 2002

    Bibliographical note

    aangevraagd door TU Delft en Stichting FOM

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