| Original language | English |
|---|---|
| IPC | H01L, H02N, H01P |
| Priority date | 23/01/20 |
| Publication status | Published - 2021 |
Bibliographical note
Patent: OCT-19-097Applicant: TU Delft
Applicant: TU Delft
Low-loss dielectric for high frequency cryogenic applications
J.J.A. Baselmans (Inventor), B.T. Buijtendorp (Inventor), A. Endo (Inventor), S. Vollebregt (Inventor)
Research output: Patent
Applicant: TU Delft