Low loss EELS of Si/Ge devices: Si, Ge, SiO2 and HfO2

FD Tichelaar, S Lazar, GA Botton

    Research output: Book/Report › Report › Professional

    Original languageUndefined/Unknown
    Place of PublicationDelft
    PublisherDelft University of Technology
    Publication statusPublished - 2003

    Publication series

    Name
    PublisherTU Delft

    Keywords

    • Geen BTA classificatie

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