Low-stress PECVD SiC thin films for IC-compatible microstructures [niet eerder opgevoerd]

Research output: Contribution to journalArticleScientificpeer-review

63 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)175-180
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume67
Publication statusPublished - 1998

Keywords

  • ZX Int.klas.verslagjaar < 2002

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