@article{e787b703c7a140339de07cd8aa20f540,
title = "Low-stress PECVD SiC thin films for IC-compatible microstructures [niet eerder opgevoerd]",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "PM Sarro and {de Boer}, CR and E Korkmaz and JMW Laros",
year = "1998",
language = "Undefined/Unknown",
volume = "67",
pages = "175--180",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
}