Low temperature, 400 °C, pure boron deposition: A solution for integration of high-performance Si photodetectors and CMOS circuits

V Mohammadi, S Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 2015 IEEE SENSORS
EditorsS Tadigadapa, J Lee
Place of PublicationPiscataway
PublisherIEEE Society
Pages1-4
Number of pages4
ISBN (Print)978-1-4799-8202-8
DOIs
Publication statusPublished - 2015
EventSENSORS 2015, Busan, South Korea - Piscataway
Duration: 1 Nov 20154 Nov 2015

Publication series

Name
PublisherIEEE

Conference

ConferenceSENSORS 2015, Busan, South Korea
Period1/11/154/11/15

Bibliographical note

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