Low-temperature chemical vapour deposition of titanium nitride

JPAM Driessen

    Research output: ThesisDissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Schoonman, Joop, Supervisor
    Award date23 Nov 1999
    Place of PublicationVeenendaal
    Publisher
    Print ISBNs90-9013159-0
    Publication statusPublished - 1999

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