Low Temperature CVD Grown Graphene for Highly Selective Gas Sensors Working under Ambient Conditions

Filiberto Ricciardella, Sten Vollebregt, T. Polichetti, B. Alfano, E. Massera, Lina Sarro

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Abstract

In this paper we report on gas sensors based on graphene grown by Chemical Vapor Deposition at 850 °C. Mo was used as catalyst for graphene nucleation. Resistors were directly designed on pre-patterned Mo using the transfer-free process we recently developed, thus avoiding films damage during the transfer to the target substrate. Devices operating at room temperature and relative humidity set at 50% were tested towards NO2. The sensors resulted to be highly specific towards NO2 and showed current variation up to 6%. The performances were compared with those of gas sensors based on graphene grown at 980 °C, which represents the usual growth temperature for such material. The findings show that by lowering the graphene growth temperature and consequently the energy consumptions the sensing benefits of these devices are still preserved.
Original languageEnglish
Title of host publicationProceedings of Eurosensors
Pages1-4
Number of pages4
DOIs
Publication statusPublished - 2017
EventEurosensors 2017: 31st Conference - Paris, France
Duration: 3 Sep 20176 Sep 2017
Conference number: 31
http://www.eurosensors2017.eu/

Publication series

NameProceedings
PublisherMDPI
Number4
Volume1
ISSN (Print)2504-3900

Conference

ConferenceEurosensors 2017
CountryFrance
CityParis
Period3/09/176/09/17
Internet address

Keywords

  • gas sensors
  • NO2
  • environmental conditions
  • graphene
  • chemical vapor deposition
  • transfer-free process

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