Low temperature deposition of TiN by plasma-assisted atomic layer deposition for system-in-package applications

SBS Heil, E Langereis, F Roozeboom, PM Sarro, MCM van de Sanden, WMM Kessels

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)
Editors s.n.
Place of PublicationUtrecht
PublisherDutch Technology Foundation
Pages92-95
Number of pages4
ISBN (Print)90-73461-50-2
Publication statusPublished - 2005
EventSTW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands - Utrecht
Duration: 17 Nov 200518 Nov 2005

Publication series

Name
PublisherDutch Technology Foundation

Conference

ConferenceSTW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands
Period17/11/0518/11/05

Keywords

  • Vakpubl., Overig wet. > 3 pag

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