@inproceedings{40022b05ce264b648a5b259fc35e52c4,
title = "Low temperature encapsulation of nanochannels with water inside",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "C Shen and VRSS Mokkapati and F Santagata and A Bossche and PM Sarro",
year = "2011",
doi = "10.1109/TRANSDUCERS.2011.5969464",
language = "English",
isbn = "978-1-4577-0156-6",
publisher = "IEEE",
pages = "854--857",
editor = "{Fan et al}, L-S",
booktitle = "16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)",
address = "United States",
note = "Transducers 2011 ; Conference date: 05-06-2011 Through 09-06-2011",
}