| Original language | English |
|---|---|
| Patent number | 2010713 |
| Priority date | 29/10/14 |
| Publication status | Published - 2014 |
Low-temperature formation of amorphous- and poly-Si based on liquid-Si
M van der Zwan (Inventor), R Ishihara (Inventor), M Trifunovic (Inventor)
Research output: Patent