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Low-temperature formation of amorphous- and poly-Si based on liquid-Si

  • M van der Zwan (Inventor)
  • , R Ishihara (Inventor)
  • , M Trifunovic (Inventor)

Research output: Patent

Original languageEnglish
Patent number2010713
Priority date29/10/14
Publication statusPublished - 2014

Bibliographical note

OCT-13-002

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