Low temperature high-mobility InZnO thin-film transistors fabricated by excimer laser annealing

M Fujii; Y Ishikawa; R Ishihara; J van der Cingel; MRT Mofrad; M Horita; Y Uraoka

doi:10.1063/1.4798519

Low temperature high-mobility InZnO thin-film transistors fabricated by excimer laser annealing

M Fujii, Y Ishikawa, R Ishihara, J van der Cingel, MRT Mofrad, M Horita, Y Uraoka

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

44 Citations (Scopus)

Original language	English
Pages (from-to)	1-4
Number of pages	4
Journal	Applied Physics Letters
Volume	102
Issue number	12
DOIs	https://doi.org/10.1063/1.4798519
Publication status	Published - 2013

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Harvest
Article number: 122107

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@article{57a64eeea28647ceb7586545a8db1e19,

title = "Low temperature high-mobility InZnO thin-film transistors fabricated by excimer laser annealing",

author = "M Fujii and Y Ishikawa and R Ishihara and {van der Cingel}, J and MRT Mofrad and M Horita and Y Uraoka",

note = "Harvest Article number: 122107",

year = "2013",

doi = "10.1063/1.4798519",

language = "English",

volume = "102",

pages = "1--4",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "12",

}

TY - JOUR

T1 - Low temperature high-mobility InZnO thin-film transistors fabricated by excimer laser annealing

AU - Fujii, M

AU - Ishikawa, Y

AU - Ishihara, R

AU - van der Cingel, J

AU - Mofrad, MRT

AU - Horita, M

AU - Uraoka, Y

N1 - Harvest Article number: 122107

PY - 2013

Y1 - 2013

UR - http://resolver.tudelft.nl/uuid:03dcb563-3b0e-44f2-8c06-975606cd4326

U2 - 10.1063/1.4798519

DO - 10.1063/1.4798519

M3 - Article

SN - 0003-6951

VL - 102

SP - 1

EP - 4

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 12

ER -

Low temperature high-mobility InZnO thin-film transistors fabricated by excimer laser annealing

Bibliographical note

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