@inproceedings{e9f094031414446eb0c4e844800cf28c,
title = "Low temperature Wafer-Level Packaging of RF-MEMS using SU-8 printing",
keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",
author = "J Tian and M Bartek",
note = "Editor onbekend JH/STW; STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands ; Conference date: 17-11-2005 Through 18-11-2005",
year = "2005",
language = "Undefined/Unknown",
isbn = "90-73461-50-2",
publisher = "Technology Stichting STW",
pages = "56--59",
editor = "s.n.",
booktitle = "Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)",
}