Low-temperature wafer-to-wafer bonding for microchemical systems

A Berthold

Research output: ThesisDissertation (TU Delft)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Beenakker, C.I.M., Supervisor
Award date1 Jan 2001
Place of PublicationDelft
Publisher
Print ISBNs90-75095-78-3
Publication statusPublished - 2001

Keywords

  • ZX Int.klas.verslagjaar < 2002

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