Original language | Undefined/Unknown |
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Title of host publication | Third International Symposium on Ultra Clean Processing of Si Surfaces |
Pages | 83-86 |
Number of pages | 4 |
Publication status | Published - 1996 |
Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems
M Caymax, L Vescan, K Werner, D Bensahel, D Gravestijn, I Szendro
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific