Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems

M Caymax, L Vescan, K Werner, D Bensahel, D Gravestijn, I Szendro

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationThird International Symposium on Ultra Clean Processing of Si Surfaces
    Number of pages4
    Publication statusPublished - 1996

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