Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems

M Caymax, L Vescan, K Werner, D Bensahel, D Gravestijn, I Szendro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Third International Symposium on Ultra Clean Processing of Si Surfaces
Pages	83-86
Number of pages	4
Publication status	Published - 1996

Cite this

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title = "Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems",

author = "M Caymax and L Vescan and K Werner and D Bensahel and D Gravestijn and I Szendro",

year = "1996",

language = "Undefined/Unknown",

pages = "83--86",

booktitle = "Third International Symposium on Ultra Clean Processing of Si Surfaces",

}

TY - GEN

T1 - Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems

AU - Caymax, M

AU - Vescan, L

AU - Werner, K

AU - Bensahel, D

AU - Gravestijn, D

AU - Szendro, I

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 83

EP - 86

BT - Third International Symposium on Ultra Clean Processing of Si Surfaces

ER -