Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry¿

S Roy, N Kumar, SF Pereira, HP Urbach

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationFringe 2013
EditorsW Osten
Place of PublicationBerlin
PublisherSpringer
Pages43-48
Number of pages6
ISBN (Print)978-3-642-36359-7
Publication statusPublished - 2013
Event7th International Workshop on Advanced Optical Imaging and Metrology - Berlin Heidelberg, Nurtingen, Germany
Duration: 8 Sep 201311 Sep 2013

Publication series

Name
PublisherSpringer

Conference

Conference7th International Workshop on Advanced Optical Imaging and Metrology
CountryGermany
CityNurtingen
Period8/09/1311/09/13

Keywords

  • Boekdeel internat.wet

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