@inproceedings{731a7d04a0444e0f849647e82e775fa6,
title = "Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry¿",
keywords = "Boekdeel internat.wet",
author = "S Roy and N Kumar and SF Pereira and HP Urbach",
year = "2013",
language = "Undefined/Unknown",
isbn = "978-3-642-36359-7",
publisher = "Springer",
pages = "43--48",
editor = "W Osten",
booktitle = "Fringe 2013",
note = "7th International Workshop on Advanced Optical Imaging and Metrology ; Conference date: 08-09-2013 Through 11-09-2013",
}