Lowering the cross correlation between different shape parameters of the inverse grating problem in coherent Fourier scatterometry

S. Roy; N. Kumar; S. F. Pereira; H. P. Urbach

doi:10.1007/978-3-642-36359-7_5

Lowering the cross correlation between different shape parameters of the inverse grating problem in coherent Fourier scatterometry

S. Roy
, N. Kumar
, S. F. Pereira
, H. P. Urbach

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology
Editors	W Osten
Place of Publication	Berlin
Publisher	Springer
Pages	43-48
Number of pages	6
ISBN (Print)	9783642363580
DOIs	https://doi.org/10.1007/978-3-642-36359-7_5
Publication status	Published - 2014
Event	7th International Workshop on Advanced Optical Imaging and Metrology - Berlin Heidelberg, Nurtingen, Germany Duration: 8 Sept 2013 → 11 Sept 2013

Publication series

Name
Publisher	Springer

Conference

Conference	7th International Workshop on Advanced Optical Imaging and Metrology
Country/Territory	Germany
City	Nurtingen
Period	8/09/13 → 11/09/13

Keywords

Boekdeel internat.wet

Access to Document

10.1007/978-3-642-36359-7_5

Cite this

@inproceedings{731a7d04a0444e0f849647e82e775fa6,

title = "Lowering the cross correlation between different shape parameters of the inverse grating problem in coherent Fourier scatterometry",

keywords = "Boekdeel internat.wet",

author = "S. Roy and N. Kumar and Pereira, \{S. F.\} and Urbach, \{H. P.\}",

year = "2014",

doi = "10.1007/978-3-642-36359-7\_5",

language = "English",

isbn = "9783642363580",

publisher = "Springer",

pages = "43--48",

editor = "W Osten",

booktitle = "Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology",

note = "7th International Workshop on Advanced Optical Imaging and Metrology ; Conference date: 08-09-2013 Through 11-09-2013",

}

Roy, S, Kumar, N, Pereira, SF & Urbach, HP 2014, Lowering the cross correlation between different shape parameters of the inverse grating problem in coherent Fourier scatterometry. in W Osten (ed.), Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology. Springer, Berlin, pp. 43-48, 7th International Workshop on Advanced Optical Imaging and Metrology, Nurtingen, Germany, 8/09/13. https://doi.org/10.1007/978-3-642-36359-7_5

Lowering the cross correlation between different shape parameters of the inverse grating problem in coherent Fourier scatterometry. / Roy, S.; Kumar, N.; Pereira, S. F. et al.
Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology. ed. / W Osten. Berlin: Springer, 2014. p. 43-48.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Lowering the cross correlation between different shape parameters of the inverse grating problem in coherent Fourier scatterometry

AU - Roy, S.

AU - Kumar, N.

AU - Pereira, S. F.

AU - Urbach, H. P.

PY - 2014

Y1 - 2014

KW - Boekdeel internat.wet

UR - https://www.scopus.com/pages/publications/84903947345

U2 - 10.1007/978-3-642-36359-7_5

DO - 10.1007/978-3-642-36359-7_5

M3 - Conference contribution

SN - 9783642363580

SP - 43

EP - 48

BT - Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology

A2 - Osten, W

PB - Springer

CY - Berlin

T2 - 7th International Workshop on Advanced Optical Imaging and Metrology

Y2 - 8 September 2013 through 11 September 2013

ER -

Lowering the cross correlation between different shape parameters of the inverse grating problem in coherent Fourier scatterometry

Publication series

Conference

Keywords

Access to Document

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Cite this