LPCVD amorphous SiCx for freestanding electron transparent windows

B Morana; JF Creemer; F Santagata; C.C Fan; HTM Pham; G Pandraud; FD Tichelaar; PM Sarro

LPCVD amorphous SiCx for freestanding electron transparent windows

B Morana, JF Creemer, F Santagata, C.C Fan, HTM Pham, G Pandraud, FD Tichelaar, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems
Editors	Y Suzuki, M Wong
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE
Pages	572-575
Number of pages	4
ISBN (Print)	978-1-4244-5764-9
Publication status	Published - 2010
Event	IEEE MEMS 2010, Hong Kong SAR, China - Piscataway, NJ, USA Duration: 24 Jan 2010 → 28 Jan 2010

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE MEMS 2010, Hong Kong SAR, China
Period	24/01/10 → 28/01/10

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{f54ca2743d184f458d16e446224d3b68,

title = "LPCVD amorphous SiCx for freestanding electron transparent windows",

keywords = "Conf.proc. > 3 pag",

author = "B Morana and JF Creemer and F Santagata and C.C Fan and HTM Pham and G Pandraud and FD Tichelaar and PM Sarro",

year = "2010",

language = "English",

isbn = "978-1-4244-5764-9",

publisher = "IEEE",

pages = "572--575",

editor = "Y Suzuki and M Wong",

booktitle = "Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems",

address = "United States",

note = "IEEE MEMS 2010, Hong Kong SAR, China ; Conference date: 24-01-2010 Through 28-01-2010",

}

Morana, B, Creemer, JF, Santagata, F, Fan, CC, Pham, HTM, Pandraud, G, Tichelaar, FD & Sarro, PM 2010, LPCVD amorphous SiCx for freestanding electron transparent windows. in Y Suzuki & M Wong (eds), Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems. IEEE, Piscataway, NJ, USA, pp. 572-575, IEEE MEMS 2010, Hong Kong SAR, China, 24/01/10.

LPCVD amorphous SiCx for freestanding electron transparent windows. / Morana, B; Creemer, JF; Santagata, F et al.
Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems. ed. / Y Suzuki; M Wong. Piscataway, NJ, USA: IEEE, 2010. p. 572-575.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - LPCVD amorphous SiCx for freestanding electron transparent windows

AU - Morana, B

AU - Creemer, JF

AU - Santagata, F

AU - Fan, C.C

AU - Pham, HTM

AU - Pandraud, G

AU - Tichelaar, FD

AU - Sarro, PM

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

UR - http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=05442439

M3 - Conference contribution

SN - 978-1-4244-5764-9

SP - 572

EP - 575

BT - Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems

A2 - Suzuki, Y

A2 - Wong, M

PB - IEEE

CY - Piscataway, NJ, USA

T2 - IEEE MEMS 2010, Hong Kong SAR, China

Y2 - 24 January 2010 through 28 January 2010

ER -

LPCVD amorphous SiCx for freestanding electron transparent windows

Publication series

Conference

Keywords

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