LPCVD silicon nitride-on-silicon spacer technology

HW van Zeijl, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationElectrochemical Society Proceedings
Editors s.n.
Place of PublicationPennington (NJ), USA
PublisherThe Electrochemical Society, Inc.
Pages153-162
Number of pages10
ISBN (Print)1-56677-426-8
Publication statusPublished - 2005
Event20th International Symposium on Microelectronics Technology and Devices, Florianópolis, Brazil - Pennington (NJ), USA
Duration: 4 Sep 20057 Sep 2005

Publication series

Name
PublisherThe Electrochemical Society, Inc
Name
Volume2005

Conference

Conference20th International Symposium on Microelectronics Technology and Devices, Florianópolis, Brazil
Period4/09/057/09/05

Bibliographical note

Editors, ISBN, uitgever & plaats onbekend

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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