LPV control of a wafer stage: beyond the theoretical solution

MB Groot Wassink, MMJ van de Wal, CW Scherer, OH Bosgra

Research output: Contribution to journalArticleScientificpeer-review

137 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)231-245
Number of pages15
JournalControl Engineering Practice
Volume13
Issue number2
DOIs
Publication statusPublished - 2005

Keywords

  • academic journal papers
  • ZX CWTS JFIS < 1.00

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