LPV control of a wafer stage: beyond the theoretical solution

MB Groot Wassink, MMJ van de Wal, CW Scherer, OH Bosgra

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	231-245
Number of pages	15
Journal	Control Engineering Practice
Volume	13
Issue number	2
DOIs	https://doi.org/doi:10.1016/j.conengprac.2004.03.008
Publication status	Published - 2005

Keywords

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title = "LPV control of a wafer stage: beyond the theoretical solution",

keywords = "academic journal papers, ZX CWTS JFIS < 1.00",

author = "{Groot Wassink}, MB and {van de Wal}, MMJ and CW Scherer and OH Bosgra",

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pages = "231--245",

journal = "Control Engineering Practice",

issn = "0967-0661",

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TY - JOUR

T1 - LPV control of a wafer stage: beyond the theoretical solution

AU - Groot Wassink, MB

AU - van de Wal, MMJ

AU - Scherer, CW

AU - Bosgra, OH

PY - 2005

Y1 - 2005

KW - academic journal papers

KW - ZX CWTS JFIS < 1.00

U2 - doi:10.1016/j.conengprac.2004.03.008

DO - doi:10.1016/j.conengprac.2004.03.008

M3 - Article

SN - 0967-0661

VL - 13

SP - 231

EP - 245

JO - Control Engineering Practice

JF - Control Engineering Practice

IS - 2

ER -