LPV controller implementation for the SIRE-T5 short sytoke wafer stage

MB Groot Wassink

Research output: Book/ReportReportProfessional

Original languageUndefined/Unknown
Place of PublicationDelft
PublisherDelft University of Technology WbMT
Number of pages49
Publication statusPublished - 2002

Publication series

Name
PublisherDelft University of Technology WbMT

Keywords

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