<100>textured self-assembled square-shaped polycrystalline silicon grains by multiple shot excimer laser crystallization

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Keywords

@article{6b9c4b05e1cb41729d5b0bbb466d4580,

title = "<100>textured self-assembled square-shaped polycrystalline silicon grains by multiple shot excimer laser crystallization",

keywords = "Elektrotechniek, Techniek, academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "M He and R Ishihara and JW Metselaar and CIM Beenakker",

year = "2006",

language = "Undefined/Unknown",

volume = "100",

pages = "083103--1--5",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing",

}

TY - JOUR

T1 - <100>textured self-assembled square-shaped polycrystalline silicon grains by multiple shot excimer laser crystallization

AU - He, M

AU - Ishihara, R

AU - Metselaar, JW

AU - Beenakker, CIM

PY - 2006

Y1 - 2006

KW - Elektrotechniek

KW - Techniek

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0021-8979

VL - 100

SP - 083103-1-5

JO - Journal of Applied Physics

JF - Journal of Applied Physics

ER -