M3: the third dimension of silicon

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationAdvanced micro and nanosystems
EditorsH Baltes, O Brand, GK Fedder, C Hierold, J Korvink, O Tabata
Place of PublicationWeinheim
PublisherWiley-VCH Verlag
Number of pages19
ISBN (Print)3-527-30746-X
Publication statusPublished - 2004


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