Macroporous based micromachining on full wafers

H Ohji, S Izuo, PJ French, K Tsutsumi

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEurosensors XIV
Editorsde R Reus, S Bouwstra
Place of PublicationLyngby
PublisherMikroelektronik Centret
Pages415-418
Number of pages4
ISBN (Print)87-89935-50-0
Publication statusPublished - 2000
Event14th European Conference on Solid-State Transducers, Copenhagen - Lyngby
Duration: 27 Aug 200030 Aug 2000

Publication series

Name
PublisherMikroelektronik Centret

Conference

Conference14th European Conference on Solid-State Transducers, Copenhagen
Period27/08/0030/08/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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