Macroporous silicon based micromachining

H Ohji

Research output: ThesisDissertation (TU Delft)

2 Citations (Scopus)
Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • French, P.J., Supervisor
  • Huijsing, J.H., Advisor
Award date14 May 2002
Place of PublicationDelft
Publisher
Print ISBNs90-5166-901-1
Publication statusPublished - 2002

Keywords

  • Elektrotechniek
  • Techniek
  • Diss. prom. aan TU Delft

Cite this