Magnetic levitation systems compared to conventional bearing systems

ATA Peijnenburg, JPM Vermeulen, J van Eijk

Research output: Contribution to journalArticleScientificpeer-review

39 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1372-1375
Number of pages4
JournalMicroelectronic Engineering
Volume83
Publication statusPublished - 2006

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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