Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Y Zhuang; M Vroubel; B Rejaei Salmassi; JN Burghartz; K Attenborough

doi:doi:10.1063/1.1857391

Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Y Zhuang, M Vroubel, B Rejaei Salmassi, JN Burghartz, K Attenborough

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

Abstract

A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (~1.0 µm). Nanonuclei (~30¿50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ~50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (~5.5 GHz) with a maximum quality factor (~3). ©2005 American Institute of Physics

Original language	Undefined/Unknown
Pages (from-to)	1-3
Number of pages	3
Journal	Journal of Applied Physics
Volume	97
Issue number	2-3
DOIs	https://doi.org/doi:10.1063/1.1857391
Publication status	Published - 2005

Keywords

academic journal papers
ZX CWTS 1.00 <= JFIS < 3.00

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doi:10.1063/1.1857391

Cite this

@article{ced04fe2bde84561bd7886a18fdf766c,

title = "Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application",

abstract = "A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (~1.0 µm). Nanonuclei (~30¿50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ~50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (~5.5 GHz) with a maximum quality factor (~3). {\textcopyright}2005 American Institute of Physics",

keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",

author = "Y Zhuang and M Vroubel and {Rejaei Salmassi}, B and JN Burghartz and K Attenborough",

year = "2005",

doi = "doi:10.1063/1.1857391",

language = "Undefined/Unknown",

volume = "97",

pages = "1--3",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing",

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TY - JOUR

T1 - Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

AU - Zhuang, Y

AU - Vroubel, M

AU - Rejaei Salmassi, B

AU - Burghartz, JN

AU - Attenborough, K

PY - 2005

Y1 - 2005

N2 - A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (~1.0 µm). Nanonuclei (~30¿50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ~50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (~5.5 GHz) with a maximum quality factor (~3). ©2005 American Institute of Physics

AB - A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (~1.0 µm). Nanonuclei (~30¿50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ~50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (~5.5 GHz) with a maximum quality factor (~3). ©2005 American Institute of Physics

KW - academic journal papers

KW - ZX CWTS 1.00 <= JFIS < 3.00

U2 - doi:10.1063/1.1857391

DO - doi:10.1063/1.1857391

M3 - Article

SN - 0021-8979

VL - 97

SP - 1

EP - 3

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2-3

ER -