Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Y Zhuang, M Vroubel, B Rejaei Salmassi, JN Burghartz, K Attenborough

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    A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (~1.0 µm). Nanonuclei (~30¿50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ~50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (~5.5 GHz) with a maximum quality factor (~3). ©2005 American Institute of Physics
    Original languageUndefined/Unknown
    Pages (from-to)1-3
    Number of pages3
    JournalJournal of Applied Physics
    Issue number2-3
    Publication statusPublished - 2005


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