Magnetization losses in submicrometer CoFeB dots etched in a high ion density Cl2-based plasma

C.G.C.H.M Fabrie, JT Kohlhepp, HJM Swagten, B Koopmans, MSP Andriesse

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2627-2630
Number of pages4
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Publication statusPublished - 2006


  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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