TY - JOUR
T1 - Maintaining transparency of a heated MEMs membrane for enabling long-term optical measurements on soot-containing exhaust gas
AU - Middelburg, Luke M.
AU - Ghaderi, Mohammadamir
AU - Bilby, David
AU - Visser, Jaco H.
AU - Zhang, Guo Qi
AU - Lundgren, Per
AU - Enoksson, Peter
AU - Wolffenbuttel , Reinoud F.
PY - 2020
Y1 - 2020
N2 - Ensuring optical transparency over a wide spectral range of a window with a view into the tailpipe of the combustion engine, while it is exposed to the harsh environment of sootcontaining exhaust gas, is an essential pre-requisite for introducing optical techniques for long-term monitoring of automotive emissions. Therefore, a regenerable window composed of an optically transparent polysilicon-carbide membrane with a diameter ranging from 100 µm up to 2000 µm has been fabricated in microelectromechanical systems (MEMS) technology. In the first operating mode, window transparency is periodically restored by pulsed heating of the membrane using an integrated resistor for heating to temperatures that result in oxidation of deposited soot (600–700 °C). In the second mode, the membrane is kept transparent by repelling soot particles using thermophoresis. The same integrated resistor is used to yield a temperature gradient by continuous moderate-temperature heating. Realized devices have been subjected to laboratory soot exposure experiments. Membrane temperatures exceeding 500 °C have been achieved without damage to the membrane. Moreover, heating of membranes to ΔT = 40 °C above gas temperature provides sufficient thermophoretic repulsion to prevent particle deposition and maintain transparency at high soot exposure, while non-heated identical membranes on the same die and at the same exposure are heavily contaminated.
AB - Ensuring optical transparency over a wide spectral range of a window with a view into the tailpipe of the combustion engine, while it is exposed to the harsh environment of sootcontaining exhaust gas, is an essential pre-requisite for introducing optical techniques for long-term monitoring of automotive emissions. Therefore, a regenerable window composed of an optically transparent polysilicon-carbide membrane with a diameter ranging from 100 µm up to 2000 µm has been fabricated in microelectromechanical systems (MEMS) technology. In the first operating mode, window transparency is periodically restored by pulsed heating of the membrane using an integrated resistor for heating to temperatures that result in oxidation of deposited soot (600–700 °C). In the second mode, the membrane is kept transparent by repelling soot particles using thermophoresis. The same integrated resistor is used to yield a temperature gradient by continuous moderate-temperature heating. Realized devices have been subjected to laboratory soot exposure experiments. Membrane temperatures exceeding 500 °C have been achieved without damage to the membrane. Moreover, heating of membranes to ΔT = 40 °C above gas temperature provides sufficient thermophoretic repulsion to prevent particle deposition and maintain transparency at high soot exposure, while non-heated identical membranes on the same die and at the same exposure are heavily contaminated.
KW - Heated silicon carbide window
KW - On-board diagnostics
KW - Optical automotive instrumentation
KW - Optical MEMS
KW - Surface regeneration from soot deposits
KW - Suspended membranes
KW - Thermophoretic repulsion of soot
UR - http://www.scopus.com/inward/record.url?scp=85077006565&partnerID=8YFLogxK
U2 - 10.3390/s20010003
DO - 10.3390/s20010003
M3 - Article
C2 - 31861255
AN - SCOPUS:85077006565
SN - 1424-8220
VL - 20
SP - 1
EP - 15
JO - Sensors (Switzerland)
JF - Sensors (Switzerland)
IS - 1
M1 - 3
ER -