@inproceedings{6400b3cca4164952a3e8dc8fc87462a6,
title = "Manipulating the hydrogen-bonding configuration in ETP-CVD a-Si:H",
keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",
author = "MA Wank and {van Swaaij}, RACMM and {van de Sanden}, MCM",
year = "2007",
language = "Undefined/Unknown",
publisher = "Material Research Society",
pages = "1--4",
editor = "HA Atwater and V Chu and S Wagner and K Yamamoto and S Miyazaki and A Nathan and J Yang and HW Zan",
booktitle = "2007 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 989 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2007",
}