Manipulating the hydrogen-bonding configuration in ETP-CVD a-Si:H

MA Wank, RACMM van Swaaij, MCM van de Sanden

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publication2007 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 989 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2007
EditorsHA Atwater, V Chu, S Wagner, K Yamamoto, S Miyazaki, A Nathan, J Yang, HW Zan
Place of PublicationWarrendale, PA
PublisherMaterial Research Society
Pages1-4
Number of pages4
Publication statusPublished - 2007

Publication series

Name
PublisherMaterial Research Society

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this

Wank, MA., van Swaaij, RACMM., & van de Sanden, MCM. (2007). Manipulating the hydrogen-bonding configuration in ETP-CVD a-Si:H. In HA. Atwater, V. Chu, S. Wagner, K. Yamamoto, S. Miyazaki, A. Nathan, J. Yang, & HW. Zan (Eds.), 2007 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 989 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2007 (pp. 1-4). Material Research Society.