Manufacture a submicron structure using a liquid precursor

Michiel van der Zwan (Inventor), Ryoichi Ishihara (Inventor), Miki Trifunovic (Inventor)

Research output: Patent

Original languageEnglish
Patent numberUS 9.620.625
IPCH01L
Priority date29/01/13
Publication statusPublished - 2017

Cite this

van der Zwan, M., Ishihara, R., & Trifunovic, M. (2017). IPC No. H01L. Manufacture a submicron structure using a liquid precursor. (Patent No. US 9.620.625).