Mapper concept, a hybrid deep-UV and electron projection lithography system for the 0.1 mm.

P Kruit (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberPCT/NL/98/00297
    IPCAangevraagd in 1998.
    Priority date1/01/00
    Publication statusPublished - 1999

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