Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application

Ying-ge Li; Lian-xiang Ma; P.M. Sarro; Dong-xing Du; Xue-feng Liu

doi:10.1109/SPAWDA.2016.7830025

Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application

Ying-ge Li, Lian-xiang Ma, P.M. Sarro, Dong-xing Du, Xue-feng Liu

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Abstract

Aluminum Nitride (AlN) based Surface Acoustic Wave (SAW) sensors have shown great application potentials on serving as biosensors. In this paper, we investigate the mass sensitivity of SAW sensors, which were fabricated based on Si/AlN structure by depositing aluminum oxide (AhO3) thin films on the active area between the input port and output port of the SAW devices. The material of the IDTs is aluminum. To validate the sample accommodation and protection function of the SiN thin film in bio-liquid detection processes, the contact angle of the SiN surface is also detected. We found that the mass sensitivity of the SAW devices is as high as 1958 MHz/g and the SiN surface is hydrophilic with contact angle of 45 degree. The research results indicate the AlN based SAW devices can be well employed in certain biosensing applications.

Original language	English
Title of host publication	Proceedings of the 2016 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA 2016
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	368-370
Number of pages	3
ISBN (Electronic)	978-1-5090-1189-6
DOIs	https://doi.org/10.1109/SPAWDA.2016.7830025
Publication status	Published - 2017
Event	2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2016) - Xi'an, China Duration: 21 Oct 2016 → 24 Oct 2016

Conference

Conference	2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2016)
Abbreviated title	SPAWDA
Country/Territory	China
City	Xi'an
Period	21/10/16 → 24/10/16

Keywords

AlN thin film
Biosensing
Contact angle
Mass sensitivity
SAW sensor

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10.1109/SPAWDA.2016.7830025

Cite this

@inproceedings{0c0ad9cff51f40f8949f15fc5729c657,

title = "Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application",

abstract = "Aluminum Nitride (AlN) based Surface Acoustic Wave (SAW) sensors have shown great application potentials on serving as biosensors. In this paper, we investigate the mass sensitivity of SAW sensors, which were fabricated based on Si/AlN structure by depositing aluminum oxide (AhO3) thin films on the active area between the input port and output port of the SAW devices. The material of the IDTs is aluminum. To validate the sample accommodation and protection function of the SiN thin film in bio-liquid detection processes, the contact angle of the SiN surface is also detected. We found that the mass sensitivity of the SAW devices is as high as 1958 MHz/g and the SiN surface is hydrophilic with contact angle of 45 degree. The research results indicate the AlN based SAW devices can be well employed in certain biosensing applications.",

keywords = "AlN thin film, Biosensing, Contact angle, Mass sensitivity, SAW sensor",

author = "Ying-ge Li and Lian-xiang Ma and P.M. Sarro and Dong-xing Du and Xue-feng Liu",

year = "2017",

doi = "10.1109/SPAWDA.2016.7830025",

language = "English",

pages = "368--370",

booktitle = "Proceedings of the 2016 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA 2016",

publisher = "IEEE",

address = "United States",

note = "2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2016), SPAWDA ; Conference date: 21-10-2016 Through 24-10-2016",

}

Li, Y, Ma, L, Sarro, PM, Du, D & Liu, X 2017, Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application. in Proceedings of the 2016 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA 2016., 7830025, IEEE, Piscataway, NJ, pp. 368-370, 2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2016), Xi'an, China, 21/10/16. https://doi.org/10.1109/SPAWDA.2016.7830025

Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application. / Li, Ying-ge; Ma, Lian-xiang; Sarro, P.M. et al.
Proceedings of the 2016 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA 2016. Piscataway, NJ: IEEE, 2017. p. 368-370 7830025.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application

AU - Li, Ying-ge

AU - Ma, Lian-xiang

AU - Sarro, P.M.

AU - Du, Dong-xing

AU - Liu, Xue-feng

PY - 2017

Y1 - 2017

N2 - Aluminum Nitride (AlN) based Surface Acoustic Wave (SAW) sensors have shown great application potentials on serving as biosensors. In this paper, we investigate the mass sensitivity of SAW sensors, which were fabricated based on Si/AlN structure by depositing aluminum oxide (AhO3) thin films on the active area between the input port and output port of the SAW devices. The material of the IDTs is aluminum. To validate the sample accommodation and protection function of the SiN thin film in bio-liquid detection processes, the contact angle of the SiN surface is also detected. We found that the mass sensitivity of the SAW devices is as high as 1958 MHz/g and the SiN surface is hydrophilic with contact angle of 45 degree. The research results indicate the AlN based SAW devices can be well employed in certain biosensing applications.

AB - Aluminum Nitride (AlN) based Surface Acoustic Wave (SAW) sensors have shown great application potentials on serving as biosensors. In this paper, we investigate the mass sensitivity of SAW sensors, which were fabricated based on Si/AlN structure by depositing aluminum oxide (AhO3) thin films on the active area between the input port and output port of the SAW devices. The material of the IDTs is aluminum. To validate the sample accommodation and protection function of the SiN thin film in bio-liquid detection processes, the contact angle of the SiN surface is also detected. We found that the mass sensitivity of the SAW devices is as high as 1958 MHz/g and the SiN surface is hydrophilic with contact angle of 45 degree. The research results indicate the AlN based SAW devices can be well employed in certain biosensing applications.

KW - AlN thin film

KW - Biosensing

KW - Contact angle

KW - Mass sensitivity

KW - SAW sensor

UR - http://www.scopus.com/inward/record.url?scp=85014171785&partnerID=8YFLogxK

U2 - 10.1109/SPAWDA.2016.7830025

DO - 10.1109/SPAWDA.2016.7830025

M3 - Conference contribution

AN - SCOPUS:85014171785

SP - 368

EP - 370

BT - Proceedings of the 2016 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA 2016

PB - IEEE

CY - Piscataway, NJ

T2 - 2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2016)

Y2 - 21 October 2016 through 24 October 2016

ER -

Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application

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