Material properties and growth process of microcrystalline silicon with growth rates in excess of 1 nm/s

EAG Hamers, AHM Smets, C Smit, JPM Hoefnagels, WMM Kessels, MCM van de Sanden

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

8 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationAmorphous and Heterogeneous Silicon-Based Films-2001; Materials Research Society Symposium Proceedings
EditorsM Stutzmann, et al.
Place of PublicationWarrendale, PENN. USA
PublisherMaterials Research Society
Pages1-6
Number of pages6
ISBN (Print)1-55899-600-1
Publication statusPublished - 2001
EventMaterials Research Society Symposium Proceedings 2001 - San Francisco, United States
Duration: 16 Apr 200220 Apr 2002

Publication series

Name
PublisherMaterials Research Society
Name
Volume664

Conference

ConferenceMaterials Research Society Symposium Proceedings 2001
CountryUnited States
CitySan Francisco
Period16/04/0220/04/02

Bibliographical note

niet eerder opgevoerd

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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