Material structure of microcrystalline silicon deposited with an expanding thermal plasma

C Smit, DL Williamson, MCM van de Sanden, RACMM van Swaaij

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationSymposium proceedings amorphous and nanocrystalline silicon-based film
EditorsJR Ableson, G Ganguly, H Matsumura, J Robertson, E Schiff
Place of PublicationWarrendale, USA
PublisherMaterials Research Society
Pages1-6
Number of pages6
ISBN (Print)1-55899-699-0
Publication statusPublished - 2003
EventAmorphous and nanocrystalline silicon-based film, - Warrendale, USA
Duration: 13 Apr 200416 Apr 2004

Publication series

Name
PublisherMaterials Research Society
Name
Volume762

Conference

ConferenceAmorphous and nanocrystalline silicon-based film,
Period13/04/0416/04/04

Keywords

  • Conf.proc. > 3 pag

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