Material structure of microcrystalline silicon deposited with an expanding thermal plasma

C Smit; DL Williamson; MCM van de Sanden; RACMM van Swaaij

Material structure of microcrystalline silicon deposited with an expanding thermal plasma

C Smit, DL Williamson, MCM van de Sanden, RACMM van Swaaij

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Symposium proceedings amorphous and nanocrystalline silicon-based film
Editors	JR Ableson, G Ganguly, H Matsumura, J Robertson, E Schiff
Place of Publication	Warrendale, USA
Publisher	Materials Research Society
Pages	1-6
Number of pages	6
ISBN (Print)	1-55899-699-0
Publication status	Published - 2003
Event	Amorphous and nanocrystalline silicon-based film, - Warrendale, USA Duration: 13 Apr 2004 → 16 Apr 2004

Publication series

Name
Publisher	Materials Research Society

Name
Volume	762

Conference

Conference	Amorphous and nanocrystalline silicon-based film,
Period	13/04/04 → 16/04/04

Bibliographical note

Nog niet opgevoerd in 2003

Keywords

Conf.proc. > 3 pag

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@inproceedings{f0a6ce1ad5e84b59a0051d27c10eb2c4,

title = "Material structure of microcrystalline silicon deposited with an expanding thermal plasma",

keywords = "Conf.proc. > 3 pag",

author = "C Smit and DL Williamson and {van de Sanden}, MCM and {van Swaaij}, RACMM",

note = "Nog niet opgevoerd in 2003; Amorphous and nanocrystalline silicon-based film, ; Conference date: 13-04-2004 Through 16-04-2004",

year = "2003",

language = "Undefined/Unknown",

isbn = "1-55899-699-0",

publisher = "Materials Research Society",

pages = "1--6",

editor = "JR Ableson and G Ganguly and H Matsumura and J Robertson and E Schiff",

booktitle = "Symposium proceedings amorphous and nanocrystalline silicon-based film",

address = "United States",

}

Smit, C, Williamson, DL, van de Sanden, MCM & van Swaaij, RACMM 2003, Material structure of microcrystalline silicon deposited with an expanding thermal plasma. in JR Ableson, G Ganguly, H Matsumura, J Robertson & E Schiff (eds), Symposium proceedings amorphous and nanocrystalline silicon-based film. Materials Research Society, Warrendale, USA, pp. 1-6, Amorphous and nanocrystalline silicon-based film, 13/04/04.

Material structure of microcrystalline silicon deposited with an expanding thermal plasma. / Smit, C; Williamson, DL; van de Sanden, MCM et al.
Symposium proceedings amorphous and nanocrystalline silicon-based film. ed. / JR Ableson; G Ganguly; H Matsumura; J Robertson; E Schiff. Warrendale, USA: Materials Research Society, 2003. p. 1-6.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Material structure of microcrystalline silicon deposited with an expanding thermal plasma

AU - Smit, C

AU - Williamson, DL

AU - van de Sanden, MCM

AU - van Swaaij, RACMM

N1 - Nog niet opgevoerd in 2003

PY - 2003

Y1 - 2003

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1-55899-699-0

SP - 1

EP - 6

BT - Symposium proceedings amorphous and nanocrystalline silicon-based film

A2 - Ableson, JR

A2 - Ganguly, G

A2 - Matsumura, H

A2 - Robertson, J

A2 - Schiff, E

PB - Materials Research Society

CY - Warrendale, USA

T2 - Amorphous and nanocrystalline silicon-based film,

Y2 - 13 April 2004 through 16 April 2004

ER -