Maximization of Transmitted Acoustic Intensity from Silicon Integrated Piezoelectric Ultrasound Transducers

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2D phased array ultrasonic transducers realized through the combination of bulk piezoelectric ceramics and complementary metal-oxide-semiconductor (CMOS) integrated circuits (IC) are enabling a new range of wearable ultrasound therapeutic applications. Traditional therapeutic ultrasound transducers have an air backing layer to maximize transmitted acoustic intensity. Yet, the pairing of piezoelectric transducers and silicon substrates commonly used in CMOS is still poorly understood. We integrated lead zirconate titanate (PZT) film on silicon membranes of various thicknesses to understand the im-pact of the silicon backing on the performance of bulk piezoe-lectric ultrasound transducers. The transducers with thinner sil-icon membranes exhibited higher acoustic intensity (up to 1.95 times while taking into account frequency shift), which is con-sistent with the simulation in finite element modeling. Transduc-ers with silicon substrate also demonstrated a consistent shift to a higher resonance frequency.

Original languageEnglish
Title of host publicationProceedings of the IUS 2022 - IEEE International Ultrasonics Symposium
Place of PublicationPiscataway
Number of pages4
ISBN (Electronic)978-1-6654-6657-8
ISBN (Print)978-1-6654-7813-7
Publication statusPublished - 2022
Event2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy
Duration: 10 Oct 202213 Oct 2022


Conference2022 IEEE International Ultrasonics Symposium, IUS 2022

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.


  • piezoelectric ultrasound transducers
  • PZT inte-gration
  • ultrasound neuromodulation


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