Maximization of Transmitted Acoustic Intensity from Silicon Integrated Piezoelectric Ultrasound Transducers

Gandhika K. Wardhana; Massimo Mastrangeli; Tiago L. Costa

doi:10.1109/IUS54386.2022.9957646

Maximization of Transmitted Acoustic Intensity from Silicon Integrated Piezoelectric Ultrasound Transducers

Gandhika K. Wardhana, Massimo Mastrangeli, Tiago L. Costa

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

27 Downloads (Pure)

Abstract

2D phased array ultrasonic transducers realized through the combination of bulk piezoelectric ceramics and complementary metal-oxide-semiconductor (CMOS) integrated circuits (IC) are enabling a new range of wearable ultrasound therapeutic applications. Traditional therapeutic ultrasound transducers have an air backing layer to maximize transmitted acoustic intensity. Yet, the pairing of piezoelectric transducers and silicon substrates commonly used in CMOS is still poorly understood. We integrated lead zirconate titanate (PZT) film on silicon membranes of various thicknesses to understand the im-pact of the silicon backing on the performance of bulk piezoe-lectric ultrasound transducers. The transducers with thinner sil-icon membranes exhibited higher acoustic intensity (up to 1.95 times while taking into account frequency shift), which is con-sistent with the simulation in finite element modeling. Transduc-ers with silicon substrate also demonstrated a consistent shift to a higher resonance frequency.

Original language	English
Title of host publication	Proceedings of the IUS 2022 - IEEE International Ultrasonics Symposium
Place of Publication	Piscataway
Publisher	IEEE
Number of pages	4
ISBN (Electronic)	978-1-6654-6657-8
ISBN (Print)	978-1-6654-7813-7
DOIs	https://doi.org/10.1109/IUS54386.2022.9957646
Publication status	Published - 2022
Event	2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy Duration: 10 Oct 2022 → 13 Oct 2022

Conference

Conference	2022 IEEE International Ultrasonics Symposium, IUS 2022
Country/Territory	Italy
City	Venice
Period	10/10/22 → 13/10/22

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

piezoelectric ultrasound transducers
PZT inte-gration
ultrasound neuromodulation

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10.1109/IUS54386.2022.9957646

Maximization_of_Transmitted_Acoustic_Intensity_from_Silicon_Integrated_Piezoelectric_Ultrasound_TransducersFinal published version, 559 KB

Cite this

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title = "Maximization of Transmitted Acoustic Intensity from Silicon Integrated Piezoelectric Ultrasound Transducers",

abstract = "2D phased array ultrasonic transducers realized through the combination of bulk piezoelectric ceramics and complementary metal-oxide-semiconductor (CMOS) integrated circuits (IC) are enabling a new range of wearable ultrasound therapeutic applications. Traditional therapeutic ultrasound transducers have an air backing layer to maximize transmitted acoustic intensity. Yet, the pairing of piezoelectric transducers and silicon substrates commonly used in CMOS is still poorly understood. We integrated lead zirconate titanate (PZT) film on silicon membranes of various thicknesses to understand the im-pact of the silicon backing on the performance of bulk piezoe-lectric ultrasound transducers. The transducers with thinner sil-icon membranes exhibited higher acoustic intensity (up to 1.95 times while taking into account frequency shift), which is con-sistent with the simulation in finite element modeling. Transduc-ers with silicon substrate also demonstrated a consistent shift to a higher resonance frequency. ",

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Wardhana, GK , Mastrangeli, M & Costa, TL 2022, Maximization of Transmitted Acoustic Intensity from Silicon Integrated Piezoelectric Ultrasound Transducers. in Proceedings of the IUS 2022 - IEEE International Ultrasonics Symposium. IEEE, Piscataway, 2022 IEEE International Ultrasonics Symposium, IUS 2022, Venice, Italy, 10/10/22. https://doi.org/10.1109/IUS54386.2022.9957646

Maximization of Transmitted Acoustic Intensity from Silicon Integrated Piezoelectric Ultrasound Transducers. / Wardhana, Gandhika K.; Mastrangeli, Massimo ; Costa, Tiago L.
Proceedings of the IUS 2022 - IEEE International Ultrasonics Symposium. Piscataway: IEEE, 2022.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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N2 - 2D phased array ultrasonic transducers realized through the combination of bulk piezoelectric ceramics and complementary metal-oxide-semiconductor (CMOS) integrated circuits (IC) are enabling a new range of wearable ultrasound therapeutic applications. Traditional therapeutic ultrasound transducers have an air backing layer to maximize transmitted acoustic intensity. Yet, the pairing of piezoelectric transducers and silicon substrates commonly used in CMOS is still poorly understood. We integrated lead zirconate titanate (PZT) film on silicon membranes of various thicknesses to understand the im-pact of the silicon backing on the performance of bulk piezoe-lectric ultrasound transducers. The transducers with thinner sil-icon membranes exhibited higher acoustic intensity (up to 1.95 times while taking into account frequency shift), which is con-sistent with the simulation in finite element modeling. Transduc-ers with silicon substrate also demonstrated a consistent shift to a higher resonance frequency.

AB - 2D phased array ultrasonic transducers realized through the combination of bulk piezoelectric ceramics and complementary metal-oxide-semiconductor (CMOS) integrated circuits (IC) are enabling a new range of wearable ultrasound therapeutic applications. Traditional therapeutic ultrasound transducers have an air backing layer to maximize transmitted acoustic intensity. Yet, the pairing of piezoelectric transducers and silicon substrates commonly used in CMOS is still poorly understood. We integrated lead zirconate titanate (PZT) film on silicon membranes of various thicknesses to understand the im-pact of the silicon backing on the performance of bulk piezoe-lectric ultrasound transducers. The transducers with thinner sil-icon membranes exhibited higher acoustic intensity (up to 1.95 times while taking into account frequency shift), which is con-sistent with the simulation in finite element modeling. Transduc-ers with silicon substrate also demonstrated a consistent shift to a higher resonance frequency.

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Maximization of Transmitted Acoustic Intensity from Silicon Integrated Piezoelectric Ultrasound Transducers

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Keywords

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