Original language | English |
---|---|
Pages (from-to) | 1-9 |
Number of pages | 9 |
Journal | Proceedings of SPIE- International Society for Optical Engineering |
Volume | 9132 |
Publication status | Published - 2014 |
Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.
J Endres, N Kumar, P Petrik, S Heidenreich, SF Pereira, HP Urbach, B Bodermann
Research output: Contribution to journal › Conference article › Scientific › peer-review
9
Citations
(Scopus)