Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

J Endres, N Kumar, P Petrik, S Heidenreich, SF Pereira, HP Urbach, B Bodermann

Research output: Contribution to journalConference articleScientificpeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalProceedings of SPIE- International Society for Optical Engineering
Volume9132
Publication statusPublished - 2014

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