Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

J Endres, N Kumar, P Petrik, S Heidenreich, SF Pereira, HP Urbach, B Bodermann

Research output: Contribution to journal › Conference article › Scientific › peer-review

11 Citations (SciVal)

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	9132
Publication status	Published - 2014

913208-1 - 913208-9

Cite this

@article{42de669c7d324677bd410304612b5ee4,

title = "Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.",

author = "J Endres and N Kumar and P Petrik and S Heidenreich and SF Pereira and HP Urbach and B Bodermann",

note = "913208-1 - 913208-9",

year = "2014",

language = "English",

volume = "9132",

pages = "1--9",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

AU - Endres, J

AU - Kumar, N

AU - Petrik, P

AU - Heidenreich, S

AU - Pereira, SF

AU - Urbach, HP

AU - Bodermann, B

N1 - 913208-1 - 913208-9

PY - 2014

Y1 - 2014

M3 - Conference article

SN - 0277-786X

VL - 9132

SP - 1

EP - 9

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -