Measurements from a novel interferometer for EUVL mirror substrates

ML Krieg, JJM Braat

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	357-366
Number of pages	10
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	5856
Publication status	Published - 2005

Keywords

@article{5b2dae5c1971400eb618e64c24a17202,

title = "Measurements from a novel interferometer for EUVL mirror substrates",

keywords = "conference contrib. refereed, Peer-lijst tijdschrift",

author = "ML Krieg and JJM Braat",

year = "2005",

language = "Undefined/Unknown",

volume = "5856",

pages = "357--366",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Measurements from a novel interferometer for EUVL mirror substrates

AU - Krieg, ML

AU - Braat, JJM

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Peer-lijst tijdschrift

M3 - Conference article

SN - 0277-786X

VL - 5856

SP - 357

EP - 366

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -