Measuring and interpreting the mechanical-thermal noise spectrum in a MEMS

LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)30-38
Number of pages9
JournalJournal of Micromechanics and Microengineering
Volume15
DOIs
Publication statusPublished - 2005

Keywords

  • academic journal papers
  • ZX CWTS 1.00 <= JFIS < 3.00

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