Measuring in the subnanometer range. Capacitive and eddy current nanodisplacement sensors

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Original language	English
Pages (from-to)	6-15
Number of pages	10
Journal	IEEE Industrial Electronics Magazine
Volume	8
Issue number	1
DOIs	https://doi.org/10.1109/MIE.2013.2285240
Publication status	Published - 2014

Harvest

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@article{88dcf9b6544b44ac969a8d6704bcfef6,

title = "Measuring in the subnanometer range. Capacitive and eddy current nanodisplacement sensors",

author = "S Nihtianov",

note = "Harvest",

year = "2014",

doi = "10.1109/MIE.2013.2285240",

language = "English",

volume = "8",

pages = "6--15",

journal = "IEEE Industrial Electronics Magazine",

issn = "1941-0115",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

number = "1",

}