Measuring in the subnanometer range. Capacitive and eddy current nanodisplacement sensors

Research output: Contribution to journalArticleScientificpeer-review

38 Citations (Scopus)
Original languageEnglish
Pages (from-to)6-15
Number of pages10
JournalIEEE Industrial Electronics Magazine
Volume8
Issue number1
DOIs
Publication statusPublished - 2014

Cite this