Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator

Mehdi Mollaie Daryani, Tomás Manzaneque, J. Wei, Murali Krishna Ghatkesar*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

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Abstract

The use of nanoparticles has been growing in various industrial fields, and concerns about their effects on health and the environment have been increasing. Hence, characterization techniques for nanoparticles are essential. Here, we present a silicon dioxide microfabricated suspended microchannel resonator (SMR) to measure the mass and concentration of nanoparticles in a liquid as they flow. We measured the mass detection limits of the device using laser Doppler vibrometry. This limit reached a minimum of 377 ag that correspond to a 34 nm diameter gold nanoparticle or a 243 nm diameter polystyrene particle, when sampled every 30 ms. We compared the fundamental limits of the measured data with an ideal noiseless measurement of the SMR. Finally, we measured the buoyant mass of gold nanoparticles in real-time as they flowed through the SMR. [Figure not available: see fulltext.].

Original languageEnglish
Article number92
Number of pages10
JournalMicrosystems and Nanoengineering
Volume8
Issue number1
DOIs
Publication statusPublished - 2022

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