Measuring wavefronts of displacement interferometer systems with sub-nm uncertainty

AJH Meskers, JW Spronck, RH Munnig Schmidt

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

In this article we describe a new and easy way to implement a measurement tool that can vary the size of the measurement area and the phase resolution without the need for changing hardware. It can evaluate wavefronts at high repeatability before as well as after an interferometer without a decrease in measurement performance and it can be applied for both homodyne and heterodyne interferometer systems. The wavefront measurement method presented is an interferometer itself, where a sample of a small area in the wavefront is taken by an optical multimode fiber and compared with a reference. It allows for measuring phase differences with a resolution of ~90µrad or ~10pm (¿=633nm) at a repeatability better than 1nm over one week. 3D wavefront reconstructions are obtained by combining multiple measurements.
Original languageEnglish
Title of host publicationProceedings of the ASPE Spring Topical Meeting and the MIT Laboratory for Manufacturing and Productivity Annual Summit entitled Precision Control for Advanced Manufacturing Systems, 21-23 April 2013, Boston, MA, USA
Editors n.a.
Place of PublicationBoston, MA, USA
PublisherASPE
Pages1-6
Number of pages6
ISBN (Print)978-1-887706-62-9
Publication statusPublished - 2013
EventASPE Spring Topical Meeting and the MIT Laboratory for Manufacturing and Productivity Annual Summit entitled Precision Control for Advanced Manufacturing Systems, Boston, MA, USA - Boston, MA, USA
Duration: 21 Apr 201323 Apr 2013

Publication series

Name
PublisherASPE

Conference

ConferenceASPE Spring Topical Meeting and the MIT Laboratory for Manufacturing and Productivity Annual Summit entitled Precision Control for Advanced Manufacturing Systems, Boston, MA, USA
Period21/04/1323/04/13

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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